Technical Proceedings of the 2010 NSTI Nanotechnology Conference & Expo - Nanotech 2010
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Nanotech 2010 Vol. 1
Chapter 2: Carbon Nano Structures & Devices
Fabrication of Nanoporous Ultrananocrystalline Diamond Membranes
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| Authors: | O.V. Makarova, R. Divan, N. Moldovan, C.-M. Tang |
| Affiliation: | Creatv MicroTech, Inc, US |
| Pages: | 242 - 245 |
| Keywords: | nanocrystalline diamond, nanoporous membranes, e-beam lithography, RIE |
| Abstract: | Nanoporous membranes engineered to mimic natural filtration systems can be used in smart implantable drug delivery systems, bioartificial organs, and other novel nano-enabled medical devices. The ultrananocrystalline diamond (UNCD) porous membranes will open new opportunities in implant medicine because of the highest, unmatched by other materials degree of biocompatibility and anti-biofouling. We report our results on high porosity high-aspect-ratio UNCD membranes fabricated using e-beam lithography, reactive ion etching and laser writing. |
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