Practical issues with ion beam milling in acoustic resonator technologies

Technical Proceedings of the 2010 NSTI Nanotechnology Conference & Expo - Nanotech 2010

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	Nanotech 2010 Vol. 2 Chapter 5: MEMS Fab: Design, Manufacture, Instrumentation Practical issues with ion beam milling in acoustic resonator technologies
Authors:	S. Mishin, Y. Oshmyansky, F. Bi
Affiliation:	Advanced Modular Systems, Inc, US
Pages:	288 - 291
Keywords:	FBAR, trimming, ion milling, SiO2, AlN
Abstract:	A practical approach to addressing production issues of thickness trimming was demonstrated through two-step trimming, send-ahead wafer, and deposition/trimming cluster tool. Thickness control necessary in SAW/BAW technology was demonstrated.
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