Technical Proceedings of the 2010 NSTI Nanotechnology Conference & Expo - Nanotech 2010
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Nanotech 2010 Vol. 2
Chapter 8: Micro & Nano Fluidics
Effect of laser processing parameters and glass type on topology of micro-channels
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| Authors: | A. Ben Azouz, D. Brabazon, M. Vázquez, M. Macka |
| Affiliation: | Dublin City University, IE |
| Pages: | 496 - 499 |
| Keywords: | pulsed CO2 laser, micro-fluidics, micro-channel, glasses, chemical detection |
| Abstract: | Traditional techniques to manufacture micro-fluidic devices are well established but most are limited to surface micro-fabrication. Laser micro-machining provides an alternative technique for micro-fabrication of devices. This paper presents the fabrication of 3-D micro-channel structures with four different types of glass, soda-lime, fused-silica, borosilicate and quartz. Results showed that quartz and fused-silica glasses provided better channel topologies for chemical sensing applications. |
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