Technical Proceedings of the 2010 NSTI Nanotechnology Conference & Expo - Nanotech 2010
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Nanotech 2010 Vol. 2
Chapter 6: MEMS & NEMS Devices
Individually addressable Cantilever Arrays for Parallel Atomic Force Microscopy
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| Authors: | T. Sulzbach, W. Engl, R. Maier |
| Affiliation: | Nanoworld Services GmbH, DE |
| Pages: | 378 - 381 |
| Keywords: | cantilever, array, AFM, piezoresistor, actuator, tip |
| Abstract: | Cantilever arrays probes with self-sensing and self-actuating cantilevers and integrated sharp silicon tips for parallel surface scanning were realized. Each cantilever is equipped with a piezoresistive deflection sensor and a thermal bimorph actuator enabling an individual tip-sample distance control which is demonstrated in parallel surface imaging experiments. The probe concept and fabrication is explained as well as the probe characteristics and first application results. |
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